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Non-contact optical measurements of surface flatness, form error and radius of curvature of spherical surface.

Equipment Specifications

Laser Flatness Interferometer

• Model: GPI-XP
• Aperture size: 100 and 300 mm
• Laser source: 0.6328 mm HeNe laser
• Accuracy: < 6.3nm (peak to valley)
• Model: Zygo Verifire HD
• Measuring range: 150 mm in diameter
• RMS repeatability: <= 0.035 nm
• Uncertainty of flatness measurement in P-V: <= 6.3 nm

High Precision White Light Interferometer

It is a non-contact areal surface profiler where an interference objective (Michelson/Mirau) is used to magnify the sample surface to be captured by a CCD camera. The resulting interference pattern based phase shifting and vertical scanning interferometry is used to measure surface topography.

• Model: Bruker ContourGT-X
• Vertocal Measuring range: up to 10 mm
• Measuring resolution: 0.1 nm
• Manification: up to 100X
• Sample Height: up to 100 mm

Flatness & Spherical Surface Laser Interferometer

A vertical laser interferometer for high-precision flatness and radius of curvature measurement of plane and spherical surface at nanometer accuracy level.

• Model: Zygo Verifire XP/D
• Measurement area: 102 mm (4 inch)
• Measurable surface reflectivity: 0.1% ~ 100%
• Measurement uncertainty: 32 nm
• Radius of curvature measurement:
• Measuring resolution of 1 µm
• Measuring range of 150 mm
• Measuring accuracy of 10 µm

Capabilities Applications

Precision measurement to evaluate the geometrical profile of mirro-finished surface (e.g. lens, wafers, etc.)

Location

V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, òòò½Íø637662

National Metrology Centre
1 Science Park Dr, òòò½Íø118221

Equipment Enquiry

• Enquiry Form